Nanoscale Dopant Profiling of Individual Semiconductor Wires by Capacitance–Voltage Measurement

نویسندگان

چکیده

Developing nanoscale electrical characterization techniques adapted to three-dimensional (3D) geometry is essential for optimization of the epitaxial structure and doping process nano- microwires. In this paper, we demonstrate assessment depletion width as well profile at individual microwire core–shell light-emitting devices by capacitance–voltage measurements. A statistical study carried out on single wires shows consistency values measured microwires compared assemblies hundreds processed same sample. The robustness method then demonstrated four structures with different growth conditions. Finally, electron-beam-induced current secondary electron profiles are used validate region position in structure.

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ژورنال

عنوان ژورنال: Nano Letters

سال: 2021

ISSN: ['1530-6992', '1530-6984']

DOI: https://doi.org/10.1021/acs.nanolett.0c04491